Plasma Surface Technology

The Department for Plasma Surface Technology bundles years of experience in development of plasma-assisted processes for modification of surfaces for applications, as well as in the high-tech sector, e.g. automobile, aeronautics, optics, microelectronics, tool manufacturing and in the life science sector, e.g. implants, biosensors, food industry, biomedical products.

A water droplet beads up on a textile surface, illustrating a hydrophobic surface modification. — Hydrophobic surface

Plasma spray system with an industrial robot guiding a plasma source to coat or modify a surface inside a shielded enclosure. — Plasma spray system

Plasma discharge inside a vacuum chamber during a magnetron-based coating process for surface modification. — Magnetron discharge

The expertise includes

Modification of metals, ceramics, glass and polymers
Surfaces with photo-catalytic effect
Scratch resistant surfaces
Wear protection
Corrosion and oxidation protection
Hydrophilic/hydrophobic surfaces
Biocompatible surfaces
Cell adhesive/sell anti-adhesive surfaces
Antimicrobial surfaces
Textile treatment
Modification of plastic surfaces
Development of atmospheric pressure plasma sources for layer deposition
Plasma electrolytic fine cleaning, polishing and deburring

Properties of materials and interaction of materials with their environment are primarily determined through the surface condition. With the aid of plasma technology it is possible to selectively modify virtually any surface property, and in this manner produce a new generation of material surfaces with special functions. Surface analysis is one of the special areas of INP. The existing spectrum of measurement apparatus, operation skills, as well as the methodology for evaluating the measured data is continuously extended and improved.

Technological equipment

Plasma processes under low pressure and normal pressure conditions

In this regard various plasma processes under low pressure and normal pressure conditions are used and theses processes being consistently further developed. Equipment in the laboratory and equipment on an industrial scale are available for this.

Processes in DC plasmas, DC-pulsed, high-frequency plasmas. and microwave plasmas
Ion implantation (PIII and PIII)
Magnetron sputtering
High Power Impulse Magnetron Sputtering (HiPIMS)
Plasma spraying
Plasma electrolytic polishing, deburring and fine cleaning
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Surface modification via atmospheric pressure discharges (DVD, plasma jet)

Use of a number of surface-analytical methods, such as XPS, REM, STEM, EDX, XRD, profilometry, and FTIR, together with a large pool of plasma diagnostics, such as FTIR, OES, Langmuir, and energy-selective mass spectrometry, enable development of high-quality processes for modification of surfaces for different application areas.