Laboratory for High-Frequency Engineering
Provision, optimization and development of methods and systems of high-frequency engineering. They are used from the small-signal range for diagnostic applications to the large-signal range for the operation of microwave plasma sources.
The focus is currently on the following systems:
- (frequency-resolved) microwave interferometry power controlled and in free radiating systems up to 150 GHz
- Electron density determination: 1012 – 1022 m-3,
∆t < 1 µs - Determination of permittivity und permeability
- Electron density determination: 1012 – 1022 m-3,
- Development and implementation of beam-shaping elements (mirrors and lenses) for the adjustment of Gaussian beam paths up to 150 GHz
- frequency-resolved reflectometry in power controlled and in free radiating systems up to 50 GHz
- Single-port interferometry for the electron density determination
- Adjustment and optimization of methods of the digital signal processing
- Development of microwave components for the manipulation of scattering parameters
- Phase shifter
- Matching networks
- Mode coupler
- Barrier-free reactor access ports
- Development of microwave plasma sources
- Mini-MIP (powers < 100 W)
- Plexc (powers < 1500 W)
The development activities in the listed fields of activity are supported by numerical tools such as Matlab©, Comsol Multiphysics© und CST Microwave Studio©. The results obtained with it can be validated by means of systems for network analysis with a measuring range up to 50 GHz.