Thin films & coatings technologies
The research programme Surfaces & Materials focuses on plasma-technology to create tailored thin films & coatings via its expertise in
- physical vapor deposition (e.g., magnetron sputtering in DC, RF and HiPIMS mode)
- chemical vapor deposition approaches (e.g., plasmapolymerization via low-pressure microwave plasmas)
- deposition processes at atmospheric pressure conditions (e.g., atmospheric plasma spraying)
To control the thin film’s microstructure as well as its morphological, electrical, mechanical and compositional properties, INP approaches a deeper understanding of process-property relations by intertwining plasma technology, plasma characterization (diagnostics and modeling) and surface & material characterization.
